Edge wheel assembly in a substrate processing brush box

ABSTRACT

An edge wheel assembly for use in a semiconductor wafer fabrication brush box is provided. The edge wheel assembly is configured to support and to rotate a semiconductor wafer in a vertical orientation and includes an edge wheel assembly block having at least two pairs of edge wheel shaft bores. Edge wheels are attached to shafts extending through the edge wheel shaft bores, and a drive motor drives the shafts to rotate the edge wheels. The drive motor is coupled to the edge wheel assembly block with a plate which is designed to enable insertion of the edge wheel assembly into either one of a first side and a second side of the brush box. Component parts are designed to be configurable to a plurality of orientations and implementations.

CROSS REFERENCE TO RELATED APPLICATION

This application claims priority from U.S. Provisional PatentApplication No. 60/301,986, filed Jun. 29, 2001, and entitled “SUBSTRATEPROCESSING BRUSH BOX.” The disclosure of the provisional application isincorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to substrate and semiconductorwafer preparation systems and methods, and more particularly, thepresent invention relates to the cleaning of substrates andsemiconductor wafers using an inventive brush box and employing space,process, and manufacturing efficient systems.

2. Description of the Related Art

In the fabrication of semiconductor devices, there is a need to performwet cleaning of substrates at various stages of the fabrication process.Typically, integrated circuit devices are in the form of multi-levelstructures. At the substrate level, transistor devices having diffusionregions are formed over and into silicon substrates. In subsequentlevels, interconnect metallization lines are patterned and electricallyconnected to the transistor devices to define the desired functionaldevice. As is well known, patterned conductive layers are insulated fromother conductive layers by dielectric materials, such as silicondioxide. At each metallization level there is a need to planarize metalor associated dielectric material. Without planarization, fabrication ofadditional metallization layers becomes substantially more difficult dueto the higher variations in the surface topography. In someapplications, metallization line patterns are formed in the dielectricmaterial, and then metal CMP operations are performed to remove excessmetallization.

Following each CMP operation, a wet clean of the substrate is performed.The wet clean is designed to wash away any by-products of thefabrication process, remove contaminants, and to achieve and maintainthe necessary degree of cleanliness essential to proceed to a subsequentfabrication operation. As transistor device structures become smallerand more complex, the precision required to achieve and maintainstructure definition demands exacting standards of cleanliness bemaintained in all process operations. If a wet clean is incomplete orineffective, or if a post-wet clean drying is incomplete or ineffective,then unacceptable residue or contaminants are introduced into theprocessing environment.

Similarly, in the fabrication of hard disk drives, planarization andcleaning operations are needed to maintain a clean and smooth disksubstrate. Residue or contaminants remaining on substrates in thefabrication of hard disks and other devices utilizing similar substratesis likewise unacceptable.

Substrate cleaning and scrubbing techniques, methods, and apparatus areplentiful and known in the art, and incorporate such operations asrinsing and scrubbing, immersion, and the application of thermal,mechanical, chemical, electrical, and/or sonic energy and the like toremove or displace water to dry the substrate. One known cleaning andscrubbing technique implements brush stations in which polyvinyl alcohol(PVA) brushes are used to scrub both sides of a substrate. In a typicalbrush station process, a substrate is rotated in a vertical orientationby substrate drive rollers, also called substrate edge wheels. As thesubstrate is rotated, a pair of cylindrical brushes or pads is broughtinto contact with the opposing surfaces of the wafer. The brushes orpads are mounted on counter-rotating mandrels disposed on opposite sidesof the wafer being processed. The mandrels span the diameter of thesubstrate across the substrate center. The rotation of the mandrelsrotates the cylindrical brushes or pads which are then applied againstthe opposing surfaces of the rotating substrate. During the scrubbingoperation in some systems, nozzles direct sprays of liquid, e.g., anabrasive slurry, a chemical solution, or a rinse solution, on theopposing surfaces of the wafer. In some applications, liquid forpolishing, scrubbing, or cleaning is supplied through the brush or pad,and some systems employ a combination of nozzles and fluid deliverythrough the brush or pad.

Substrate fabrication equipment is typically configured in integratedsystems to maximize efficiency of processing by combining a plurality offabrication processes to minimize substrate transfer and handling, tomaximize the economical utilization of clean room floor space, and tomaximize production throughput. Since a substrate wet cleaning isperformed after many of the substrate fabrication steps, brush stationsare often integrated into a plurality of fabrication and processingsystems. By way of example, brush stations may be configured in pairs,side by side, with a pair of spin, rinse, and dry (SRD) tools configuredvertically above the brush stations. Two brush stations are used, eachwith a pair of brushes, to enable the application of chemicals in onebrush station and deionized (DI) water in the other. This dual brushstation approach has been shown to improve the cleaning performance aswell as increase throughput. In another typical configuration, each ofthe pair of brush stations performs the same scrubbing, cleaning, orother process operation, and the tandem implementation increasesefficiency and throughput.

In typical prior art processing systems implementing one or more brushstations, the brush stations are specifically designed and configuredfor the particular system in which it is to be used, and often designedand configured for a specific location within an integrated system.Although many brush station parts, e.g., the brushes, areinterchangeable between the various brush stations, each station isoften unique to a particular implementation, and a specific locationwithin the system, and typically requires manufacture of individual andspecific components or parts for specific locations or implementations.

In view of the foregoing, there is a need for substrate brush stationpreparation systems and methods that provide modular and interchangeablebrush stations with ease of access for service, ease of configurationfor a plurality of system implementations, ease of configuration for aplurality of substrates and substrate sizes, and that maximize thecleaning and processing of wafers and other substrates in order to meetand exceed the ever more stringent cleanliness requirements forfabrication processes.

SUMMARY OF THE INVENTION

Broadly speaking, the present invention fills these needs by providing asubstrate processing brush box that is modular and symmetrical in designand implementation enabling ease of configuration and incorporation intoa plurality of substrate processing applications. In particular, theedge wheel assembly of the substrate processing brush box provides amodular component of the brush box that is easily configurable to aplurality of applications.

In one embodiment, a modular edge wheel assembly in a brush box forprocessing a substrate is disclosed. The modular edge wheel assemblyincludes an edge wheel assembly block and a pair of edge wheels. Eachedge wheel is connected to an edge wheel shaft at a processing end, andeach edge wheel shaft projects through the edge wheel assembly blockthrough an edge wheel shaft bore. The modular edge wheel assemblyfurther includes an edge wheel drive motor which is configured to driveedge wheel drive pulleys. The edge wheel drive pulleys are connected toa drive end of each edge wheel shaft. The modular edge wheel assembly isconfigurable to be attached as a unit to one of a right side and a leftside of the brush box.

In another embodiment, an edge wheel assembly for supporting avertically oriented substrate is disclosed. The edge wheel assembly isdesigned to be inserted into side walls of a brush box. The edge wheelassembly includes an edge wheel assembly block which is capable ofinterchangeably mounting to either of two side walls of the brush box.The edge wheel assembly also includes a first edge wheel and a secondedge wheel mounted to the edge wheel assembly block. Each of the edgewheels has a groove that is capable of supporting the substrate. Thefirst and second edge wheels are further aligned with one another toenable rotation of the supported substrate. The edge wheel assemblyfurther includes a drive motor coupled to a plate. The plate is designedto couple to the edge wheel assembly block at either one of a first sideand a second side of the edge wheel assembly block. The first side andthe second side of the edge wheel assembly block are external to thebrush box.

In yet another embodiment, an edge wheel assembly is disclosed. The edgewheel assembly is used in a semiconductor wafer fabrication brush box,and is configured to support and to rotate a semiconductor wafer in avertical orientation within the brush box. The edge wheel assemblyincludes an edge wheel assembly block that has at least two pairs ofedge wheel shaft bores through the edge wheel assembly block. Further,the edge wheel assembly block includes a first edge wheel attached to aprocessing end of a first edge wheel shaft, and a second edge wheelattached to a processing end of a second edge wheel shaft. The firstedge wheel shaft and the second edge wheel shaft extend through the edgewheel assembly block in one of the at least two pairs of edge wheelshaft bores. The edge wheel assembly also includes a drive motor coupledto the edge wheel assembly block with a plate. The plate is designed tocouple the drive motor to either one of a first position and a secondposition on the edge wheel assembly block, the first position and thesecond position are each external to the brush box and enable insertionof the edge wheel assembly into either one of a first side and a secondside of the brush box.

The advantages of the present invention are numerous. One notablebenefit and advantage of the invention is the modular design. Assemblyand component parts of the present invention are designed forconfiguration to a plurality of implementations of the presentinvention. Assembly and component parts can be configured for right-handor left-hand access using the same parts, and thus significantlyreducing the cost of manufacture. Instead of typical prior art speciallydesigned and manufactured parts for specific implementations, thepresent invention incorporates symmetrical design providing for modularparts that can be turned, reversed, or otherwise simply configured for aparticular location or implementation. In addition to significantlyreducing the cost of manufacture, training costs are reduced, andserviceability is greatly increased.

Another benefit is the ease with which the present invention isconfigured for a plurality of substrate sizes. In some substrateprocessing implementations, it is preferable to utilize brushes or padsthat are specifically matched to a substrate size. In one embodiment ofthe present invention, brushes or pads are easily changed on brushassembly mandrels, or entire brush assemblies can be easily configuredfor specific substrate sizes, and the brush assemblies implemented inembodiments of the present invention as desired.

An additional benefit is the ability to integrate the system intoexisting process equipment resulting in increased quality and quantityof product with fewer defects or scrap due to contamination. Oneembodiment of the invention is of essentially identical dimension asexisting brush boxes, and the present invention can be implemented toreplace existing tools with embodiments of the present invention with aresulting increase in serviceability and performance.

Other advantages of the invention will become apparent from thefollowing detailed description, taken in conjunction with theaccompanying drawings, illustrating by way of example the principles ofthe invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be readily understood by the followingdetailed description in conjunction with the accompanying drawings,wherein like reference numerals designate like structural elements.

FIG. 1 shows a brush box in accordance with one embodiment of thepresent invention.

FIG. 2 shows another view of brush box in accordance with an embodimentof the invention.

FIG. 3 shows another perspective of brush box 100 in accordance with anembodiment of the invention.

FIG. 4 shows a perspective from the rear of brush box in accordance withan embodiment of the invention.

FIG. 5A is an exploded view of door in accordance with an embodiment ofthe invention.

FIG. 5B shows another perspective with a plan view of door in accordancewith an embodiment of the invention.

FIG. 6A shows a detail view of the brush drive assembly in accordancewith one embodiment of the present invention.

FIG. 6B shows a detailed view of brush angle gears, load cell, and wormgear in accordance with an embodiment of the invention.

FIG. 7A shows a view of the brush drive assembly in accordance with anembodiment of the invention.

FIG. 7B shows another perspective of a brush drive assembly inaccordance with an embodiment of the invention.

FIG. 7C shows another perspective of a brush drive assembly inaccordance with an embodiment of the invention.

FIG. 8A shows a view of a brush drive assembly in accordance with anembodiment of the present invention.

FIG. 8B shows another view of a brush drive assembly in accordance withan embodiment of the invention.

FIG. 8C shows another view of a brush drive assembly in accordance withan embodiment of the invention.

FIG. 8D shows another view of a brush drive assembly in accordance withan embodiment of the invention.

FIG. 9A is an exploded view of a brush drive assembly in accordance withanother embodiment of the present invention.

FIG. 9B is another exploded view of a brush drive assembly in accordancewith an embodiment of the invention.

FIG. 10A is a side plan view of a brush drive assembly in accordancewith an embodiment of the present invention.

FIG. 10B is a bottom plan view of a brush drive assembly in accordancewith an embodiment of the invention.

FIG. 11A shows an exploded view of a single brush drive, in accordancewith an embodiment of the invention.

FIG. 11B shows another perspective of an exploded brush drive, inaccordance with one embodiment of the present invention.

FIG. 11C shows a detail view of the brush drive housing shown in FIG.11B.

FIG. 12A is a cross-section view of a brush drive, in accordance with anembodiment of the invention.

FIG. 12B shows a detail view of the mandrel support connector shown inFIG. 12A.

FIG. 12C shows a detail view of the brush drive housing shown in FIG.12A.

FIG. 13A shows another side plan view of a brush drive assembly inaccordance with an embodiment of the present invention.

FIG. 13B is another bottom plan view of a brush drive assembly inaccordance with an embodiment of the invention.

FIG. 13C shows a detail view of the brush drive components from FIG. 13Bthat are exterior to the brush box.

FIG. 14A shows a detailed view of modular edge wheel assembly inaccordance with an embodiment of the invention.

FIG. 14B shows another view of edge wheel assembly in accordance with anembodiment of the invention.

FIG. 14C shows another view of edge wheel assembly in accordance with anembodiment of the invention.

FIG. 14D shows a cross-sectional view of edge wheel assembly inaccordance with an embodiment of the invention.

FIG. 14E shows a detail cross-sectional view of shaft bores from FIG.14D.

FIG. 14F is a side plan view of edge wheel assembly in accordance withan embodiment of the present invention.

FIG. 15A shows another perspective view of edge wheel assembly inaccordance with an embodiment of the invention.

FIG. 15B shows another perspective view of edge wheel assembly inaccordance with another embodiment of the present invention.

FIG. 15C shows another perspective view of edge wheel assembly inaccordance with another embodiment of the invention.

FIG. 16A shows an integrated processing tool incorporating a pair ofbrush boxes in accordance with an embodiment of the invention.

FIG. 16B shows the same integrated processing tool as in FIG. 16A from adifferent angle.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

An invention for substrate preparation is disclosed. In preferredembodiments, apparatus and methods include a substrate processing brushbox of symmetrical and modular design for implementation in a pluralityof substrate processing tools and applications. The substrate processingbrush box incorporates a modular brush drive assembly and a modular edgewheel assembly.

In the following description, numerous specific details are set forth inorder to provide a thorough understanding of the present invention. Itwill be understood, however, to one skilled in the art, that the presentinvention may be practiced without some or all of these specificdetails. In other instances, well known process operations have not beendescribed in detail in order not to unnecessarily obscure the presentinvention.

FIG. 1 shows a brush box 100 in accordance with one embodiment of thepresent invention. In FIG. 1, brush box 100 is shown in an openconfiguration revealing a number of structural features in the interiorof the brush box 100. In one embodiment, brush box 100 is operated withthe interior of the brush box 100 at less than atmospheric pressure, andtherefore must be sealed. Brush box door 110 provides access to theinterior structural components of brush box 100, and provides a surfacethrough which a substrate 124 is inserted into and removed from theinterior of the brush box 100. Inner door panel 112 provides an interiorstructure on the brush box door 110, and a slot door panel (not visiblein FIG. 1) is configured in between the brush box door 110 and the innerdoor panel 112. Slot door panel 142 (see FIG. 5A) provides a seal tocontain the interior region of the brush box 110, and in an openposition, provides access for inserting or removing a substrate 124.

In one embodiment, an edge wheel assembly 114 is configured to a side ofthe brush box 100. The modular edge wheel assembly 114 is attached tothe illustrated brush box 100 through a side panel and provides support,positioning, cooling, movement, and the like for edge wheels 116 as isdescribed in greater detail below in reference to FIGS. 14A-14E and15A-15C. In FIG. 1, front edge wheel 116 a is shown providing supportfor a substrate 124 positioned in brush box 100. Rear edge wheel 116 bis not visible in the illustrated brush box 100. Front edge wheel 116 aand rear edge wheel 116 b are configured to support a substrate 124 in avertical orientation within brush box 100, and to rotate, which rotatesthe substrate supported thereon.

A substrate stabilizer is configured to support a top edge of substrate124 when the substrate 124 is positioned on edge wheels 116, and brushes118 are in a retracted position away from the substrate 124. Thesubstrate stabilizer assembly 134 is configured to a side panel of brushbox 100 and includes an actuator 133 and a substrate stabilizer arm 122.In one embodiment, the actuator 133 positions connecting rods in thesubstrate stabilizer assembly 134 which position the substratestabilizer arm 122 in brush box 100. In one embodiment, the substratestabilizer assembly 134 is controlled in conjunction with a substratesensing system and a brush positioning system to ensure the substratestabilizer arm 122 is positioned to support the substrate 124 in avertical orientation only when a substrate is present and the brushes118 are in a retracted position away from substrate 124 surfaces, or areto be moved into the retracted position. Brush box 100 and substratestabilizer assembly 132 are configured so that substrate stabilizerassembly 132 can be configured to either side panel of brush box 100 tomaximize access for serviceability in a plurality of brush box 100configurations and implementations.

In FIG. 1, substrate 124 is positioned between brushes attached to brushcores 118 which are mounted on counter-rotating mandrels (not visible inFIG. 1) and configured to a brush drive assembly 120. The brush driveassembly 120 is configured through the rear of brush box 100, and isdescribed in greater detail below in reference to FIGS. 6A-13C. In oneembodiment of the invention, the brush drive assembly 120 is generallyconfigured to counter-rotate mandrels (not visible) with brushes andbrush cores 118 attached thereto. The counter-rotating brushes areapplied to opposing surfaces of substrate 124, which is rotated by frontedge wheel 116 a and rear edge wheel 116 b (not visible). The brushdrive assembly 120 is configured to supply fluid for cleaning,polishing, buffing, and the like through the counter-rotating brushes.In one embodiment, fluid is supplied to the fluid delivery systemthrough brushes and brush cores 118 at fluid delivery fitting 136.

Also shown in FIG. 1 is wafer sensing apparatus 132. Wafer sensingapparatus 132 is configured to each side panel of brush box 100 andsenses the presence of a substrate 124 in processing position withinbrush box 100. In one embodiment, wafer sensing apparatus 132 is afiberoptic system that senses the presence of substrate 124 inprocessing position between brushes on brush cores 118 and on the edgerollers 116. In one embodiment, the wafer sensing apparatus 132transmits the state of substrate presence to a system controller (notshown) to enable or disable a plurality of functions of and within brushbox 100. By way of example, position of substrate stabilizer arm mightbe enabled by presence of a substrate, opening of door 110 might bedisabled by presence of a substrate, delivery of fluids through thefluid delivery system might be enabled by the presence of a substrate,and the like.

In accordance with one embodiment of the present invention, brush box100 is of a symmetrical and modular configuration about a vertical axisor center line through brush box 100 to enable integration into aplurality of fabrication and processing tools. In one embodiment of theinvention, brush box 100 is typically implemented as a right-hand or aleft-hand brush box 100 within a system. In fabricating brush box 100 asessentially symmetrical about a vertical center line, components of thebrush box 100 that are typically mirrored as right and left components,or right and left brush box 100 assemblies, are generally fabricated asessentially identical parts that are mounted, configured, attached, andthe like as mirror images, as will be illustrated and described inseveral examples below. Additionally, symmetrical configurationminimizes fabrication of specialized component parts of brush box 100.By way of example in FIG. 1, door 110 is shown with hinges 126 on theleft side of door 110, and securing screws 130 along the right edge ofdoor 10. Door 110 is easily configured to be hinged on the right sidewith hinges 126 attached to hinge cut outs 127 on door 110 and affixedin holes 128 in the front panel of brush box 100. Similarly, securingscrews 130 can be attached along left edge of door 110. In this manner,door 110 is easily configured for either right hand or left handopening, using the same parts for either configuration.

In FIG. 1, edge wheel assembly 114 is shown attached to brush box 100through the right panel. In one embodiment of the invention, brush box100 might be configured to a fabrication or processing tool, orintegrated processing system, so that access and serviceability of brushbox 100 is maximized. As will be described in greater detail below inreference to FIGS. 14A-15C, edge wheel assembly 114 is configurablethrough either the right or the left panel of brush box 100.Additionally, edge wheel assembly 114 is configurable through either theright or left panel of brush box 100 using substantially the sameassembly and support/mounting parts in either position. As can be seenin FIG. 1, an edge wheel assembly mounting position 131 is visible inthe left panel of brush box 100. The position of the edge wheel assembly114 is then easily configured depending on the specific application orlocation of brush box 100 within a tool or integrated processing system.

The modular design of brush box 100 is implemented in both the generalstructure of the brush box 100 and in the individual assembliesincorporated into brush box 100. By way of example, one embodiment ofthe present invention can be implemented in a wafer fabrication cleaningand drying tool which includes two brush boxes 100 side-by-side, and twoSRD tools mounted vertically over the brush boxes, one SRD over eachbrush box 100 (see FIGS. 16A and 16B). The tool might be configured in astand or rack to supply power, gas or liquid chemistry, water, exhaust,drainage, and the like. In such a tool, each of the integrated brushboxes 100 might be configured to provide maximum serviceability andaccess with exterior configuration of the edge wheel insert assemblies114, doors 10 configured to open toward the center of the tool, and thelike. Each brush box 100 might be configured for a particularapplication and location, but using substantially the same brush box 100and support/mounting structures in each configuration.

FIGS. 2-4 show additional views of brush box 100 with various featuresas described above identified from a plurality of angles in accordancewith an embodiment of the invention. FIG. 2 shows another view of brushbox 100 in accordance with an embodiment of the invention. In FIG. 2,brush box 100 is once again shown in an open configuration. Brush boxdoor 100 provides access into an interior region of brush box 100, andis attached to brush box 100 at hinges 126. Brush box door can besecured to the brush box 100 body with securing screws 130 along an edgeopposite hinges 126. Hinge cut outs 127 on brush box door 110, andcorresponding holes 128 on brush box 100 illustrate the ability toconfigure brush box door 110 to open from either edge utilizing the samecomponent parts. On the interior of brush box door 110 is inner doorpanel 112. Brush box door is described in greater detail below inreference to FIGS. 5A and 5B.

Wafer sensing apparatus 132 senses the presence of a substrate inprocessing position within brush box 100, between brushes on brushrollers 118 and supported on edge wheels 116. Wafer sensing interiorflange 132 a is visible on an interior wall of brush box 100. Alsovisible in an interior of brush box 100 are brush cores 118, fluiddelivery fittings 136, and fluid delivery plugs 137 which are describedin detail below in reference to FIGS. 6A-13C which illustrateembodiments of the brush drive assembly 120.

Edge wheel assembly 114 includes the various components associated withthe edge wheels 116 (front edge wheel 116 a is shown in FIG. 2),including edge wheel assembly block fitting 206 which provides aconnection for fluid supply to the components of the edge wheel assembly114. As described in greater detail in reference to FIGS. 14A-15C, thesymmetrical design of the edge wheel assembly 114 provides for theability to position the edge wheel assembly 114 in either of a fightpanel or a left panel of brush box 100. In FIG. 2, an edge wheelassembly mounting position 131 is visible in a panel of brush box 100opposite edge wheel assembly 114.

Above edge wheel assembly 114 in FIG. 2 is the substrate stabilizerassembly 134 and actuator 133 as described above in reference to FIG. 1.Substrate stabilizer arm 122 (see FIG. 1) is not visible in FIG. 2.

FIG. 3 shows another perspective of brush box 100 in accordance with anembodiment of the invention. In FIG. 3, door 110 is in an open position,but the interior of brush box 100 is not visible. As described above,door 110 can be configured to brush box 100 to open from either edge,and is attached to brush box 100 with hinges 126 and securing screws130. Holes 128 and hinge cut-outs 127 accept hinges 126 when attachingbrush box door 110 to brush box 100.

FIG. 3 also shows another perspective of wafer sensing apparatus 132,and an exterior view of edge wheel assembly mounting position 131. Thatportion of the brush drive assembly 120 exterior to the brush box 100 isshown in a rear section of brush box 100.

FIG. 4 shows a perspective from the rear of brush box 100 in accordancewith an embodiment of the invention. As in FIG. 3, that portion of thebrush drive assembly 120 that remains exterior to brush box 100 isvisible in FIG. 4. Also shown is edge wheel assembly 114, including edgewheel drive motor 202 which remains in an external location to brush box100. The wafer sensing apparatus 132, substrate stabilizer assembly 134and actuator 133, and a view of holes 128 that accept hinges 126 (notshown) are all identified in FIG. 4.

FIGS. 5A and 5B show additional detail of door 110 in accordance with anembodiment of the present invention. FIG. 5A is an exploded view of door110 in accordance with an embodiment of the invention. In FIG. 5A, door110 is shown with hinges 126 attached to the right side of door 110, andsecuring screws 130 configured along the left edge of door 110.Consistent with the overall design of brush box 100 in one embodiment,door 10 is substantially symmetrical and configurable to be attached tobrush box 100 with hinges 126 on either the right side of door 110 or onthe left side of door 110. Hinge cut outs 127 are shown opposite hinges126, and attachment points are provided for securing screws 130 alongboth the right and left edges of door 110 to be configured with securingscrews 130 along whichever edge is opposite the hinges 126. A singledoor 110 is thus provided to be configured for a plurality of brush box100 applications and configurations, and can be manufactured as a singlecomponent part rather than a specialized part for a particularapplication, location or configuration.

Slot 140 is provided in substantially the center of door 110. Slot 140is generally configured to provide access to brush box 100 for theinsertion or extraction of a substrate 124 (not shown). Slot door 142 ispositioned between door I 10 and door inner panel 112 and provides forscaling the interior of brush box 100. In one embodiment, slot door 142is configured to slide into either one of an open position or a closedposition between door 110 and door inner panel 112. Door inner panel 112is therefore larger on one side of slot 140 than on the other. In orderto maintain the symmetrical design of brush box 100, inner door panel112 is configured to be reversible to accommodate the sliding of slotdoor 142 to an open position on either the right or left side of slot140.

FIG. 5B shows another perspective with a plan view of door 110 inaccordance with an embodiment of the invention. Identified features ofdoor 110 in FIG. 5B include hinges 126, hinge cut outs 127, securingscrews 130, and door inner panel 112.

FIGS. 6A and 6B show a detail view of the brush drive assembly 120 inaccordance with one embodiment of the present invention. Referring toFIG. 6A, brush drive assembly 120 includes a right brush drive 150 a anda left brush drive 150 b which are assembled from substantiallyidentical parts configured to face each other and to be pivoted into adesired position as will be described below. In one embodiment, rightbrush drive 150 a and left brush drive 150 b are configured with brushesattached to brush cores 118 mounted on counter rotating mandrels (notvisible). Mandrel support arms 152 are provided for support of themandrel, brush, and brush core 118 structures. Each mandrel support arm152 and mandrel (not visible) is connected on one end to a brush drivehousing 153. Brush drive housing 153 is configured to house gears toimpart rotation of brush drive shaft 154 to mandrel and, in oneembodiment, the side-by-side right brush drive 150 a and left brushdrive 150 b are configured with counter-rotating mandrels. A mandrelsupport connector 151 is provided at a distal end of the right brushdrive 150 a and the left brush drive 150 b to connect the mandrel andthe mandrel support arm 152. A bearing (not visible) is provided toallow the mandrel to rotate freely in the mandrel support connector 151.In one embodiment, the mandrel support arm 152 is configured to besubstantially rigid and fixed in place.

In one embodiment of the invention, fluids used for cleaning, polishing,buffing, rinsing, and the like are delivered through brushes attached tobrush cores 118 and applied to substrate surfaces by the brushes. Fluidsare supplied to the interior of mandrels (not visible) at fluid deliveryfittings 136. In one embodiment, the structure of the right brush drive150 a is substantially identical to the structure of left brush drive150 b. Fluid delivery plugs 137 are provided to allow the fluid deliveryfittings 136 to be configured to a top surface of each brush drive 150,and allow the substantially identical brush drives 150 to be configuredto either a right or a left position in brush drive assembly 120.Configuration is accomplished by turning, rotating, flipping, reversing,or otherwise re-positioning essentially identical component parts into aright or left, top or bottom, position.

In one embodiment, fluid delivery through the brush is supplemented withfluid delivery through a manifold (not shown) configured in or tomandrel support arms 152. Fluid is sprayed, dripped, or otherwisedispensed through manifolds (not shown) that span the length of mandrelsupport arms 152. In one embodiment, fluid delivery is configured toinclude at least two separate systems such that one fluid deliverysystem supplies fluid through mandrels and brushes through fluiddelivery fittings 136, and another fluid delivery system supplies fluidthrough manifolds through what is shown in FIG. 6A as fluid deliveryplugs 137. In this manner, by way of example, chemistries can be mixedon the surface of a substrate and used for cleaning, polishing, buffing,and the like, or a rinse operation can immediately follow a processutilizing a processing chemistry, or any other desired combination ofsame or different fluid or chemistry delivery. In one embodiment, thefluid delivery system includes a common delivery through both themandrels and brushes 118, and through manifolds along mandrel supportarms 152.

Brush drive housings 153 are attached to brush drive front mountingplate 156, and configured to provide for the positional pivoting ofright brush drive 150 a and left brush drive 150 b, and, in oneembodiment, to seal the gears, bearings, bushings, and such structuresconfigured to impart rotational force to the mandrels. Brush driveshafts 154 extend through brush drive front mounting plate 156 and areconfigured to rotate. One end of the brush drive shafts 154 terminatesin brush drive housing 153 where the rotation of brush drive shafts 154is imparted through gears, in one embodiment, to mandrels (not shown) ofthe right brush drive 150 a and the left brush drive 150 b. In oneembodiment, brush drive front mounting plate 156 defines a barrierbetween the structures that will be within brush box 100 (see FIGS. 14)including brush drive housings 153 and right and left brush drives 150a, 150 b, and those structures that will be external to the brush box100.

In one embodiment, the rotation of the mandrels is caused by a motor 176configured to a brush drive rear mounting plate 178. Motor 176 turnsbrush rotating drive pulley 172. Belt 174 connects brush rotating drivepulley 172 to right brush rotating pulley 170 a and left brush rotatingpulley 170 b, and is configured to turn right brush rotating pulley 170a and left brush rotating pulley 170 b in opposite directions. Rightbrush rotating pulley 170 a and left brush rotating pulley 170 b drivebrush drive shafts 154, resulting in the counter-rotation of themandrels.

In addition to counter-rotating mandrels, one embodiment of theinvention provides for pivoting right brush drive 150 a and left brushdrive 150 b to bring brushes on brush cores 118 together, and toseparate brushes on brush cores 118 to create an opening between brushesof the right brush drive 150 a and the left brush drive 150 b. Referringto FIG. 1, brushes on brush cores 118 are separated in order to enablesubstrate 124 to be inserted in between the brushes. Once substrate 124is in place in between brushes, supported on edge rollers 116, andstabilized by substrate stabilizer arm 122, brushes on brush cores 118are positioned together to contact opposing surfaces of substrate 124.In one embodiment, the cleaning, polishing, buffing, and the like of asubstrate 124 is enhanced and/or manipulated by the application ofvarying degrees of force against the opposing surfaces of substrate 124by brushes attached to brush cores 118.

Returning to FIG. 6A, brush angle gears 158 are configured to positionbrush drive shafts 154 to coordinately move right brush drive 150 a andleft brush drive 150 b to move the brushes on brush cores 118 togetherand to separate the brushes attached to brush cores 118. In oneembodiment, the positioning of brush drive shafts 154 by brush anglegears 158 pivots the right brush drive 150 a and the left brush drive150 b. Brush drive housings 153 are configured to allow the coordinatemovement of the right brush drive 150 a and the left brush drive 150 bin equal and opposite directions. As right brush drive 150 a pivots in adirection to position right brush on brush core 118 towards a centeraxis between the right brush drive 150 a and the left brush drive 150 b,the left brush drive 150 b pivots in the opposite direction positioningthe left brush on brush core 118 towards the same center axis betweenthe right brush drive 150 a and the left brush drive 150 b. Brush anglegears 158 are configured to position brush drive shafts 154 in equal andopposite directions of movement. Brush drive housings 153 are configuredto allow a maximum range of motion for right brush drive 150 a and leftbrush drive 150 b to pivot brushes attached to brush cores 118 towards acenter axis where a substrate would be positioned in a verticalorientation, and as well to pivot brushes away from the center axisproviding for the insertion or removal of a substrate.

In one embodiment, movement of the brush angle gears 158 is driven byworm gear 162. Worm shaft 164 is rotated to spin worm drive 166 whichdrives worm gear 162. Movement of worm gear 162, therefore, results intorque being applied to brush drive shaft 154. In one embodiment, wormshaft 164, worm drive 166, and worm gear 162 provide for positive,precise positioning of brush drives 150 a, 150 b. Interlocked brushangle gears 158 ensure movement of right brush drive 150 a is equal andopposite to that of left brush drive 150 b.

Until brushes attached to brush cores 118 contact opposite sides of asubstrate (not shown), resistance to pivotal positioning of right brushdrive 150 a and left bush drive 150 b is generally limited to frictionbetween gears, bearings, and the like. Once the brushes, however,contact opposite surfaces of a substrate (not shown), measurable forcecan be applied in order to position brushes attached to brush cores 118,resulting in measurable force applied against the surfaces of thesubstrate. In one embodiment, frictional resistance is calibrated andaccommodated, and the force applied to position the brushes attached tobrush cores 118 is measured, and is approximately equal to the forceapplied the wafer surface, with reasonable calculation. In oneembodiment, a load cell 160 is provided to measure the force applied toposition brushes, enabling the measurement of force applied to substratesurfaces. The ability to measure and control the force applied tosubstrate surfaces by brushes enables more precise and controlledsubstrate processing. In one embodiment, a load cell (not shown) isconfigured to the edge wheels (see FIGS. 14A-15C) to measure the forceof the substrate downward on the edge wheels as a component of the forceapplied to the substrate surfaces.

FIG. 6B shows a detailed view of brush angle gears 158, load cell 160,and worm gear 162. The component parts precisely control the pivoting ofright and left brush drives 150 a, 150 b (see FIG. 6A), and in oneembodiment, worm gear 162 and associated structures enable controlled,incremental positioning of brush drives in order to apply desired andmeasurable force against substrate surfaces for processing. Theillustrated component parts, all on the same side of brush drive frontmounting plate 156, are external to the brush box 100 (see FIG. 1) whenbrush drive assembly 120 is configured to brush box 100.

Referring once again to FIG. 6A, in one embodiment, each of thecomponent parts of brush drive assembly 120 that is implemented in pairs(e.g., brush positioning pulleys 170 a and 170 b, brush angle gears 158,brush drive shafts 154, brush drive housings 153, brush drives 150 a and150 b, brush cores 118, and the like) are manufactured as identicalcomponent pieces, and then configured for a particular (e.g., right orleft) implementation in brush drive assembly 120. Cost of manufacture issignificantly decreased by reduction in specialized part manufacture,and serviceability is significantly increased. In one embodiment, mostassemblies that include a right and left (or top and bottom) componentpart use identically manufactured parts that are reversed, turned, orotherwise configured to be implemented in a desired location.

In one embodiment of the invention, right brush drive 150 a and leftbrush drive 150 b are configured to process a plurality of substratesizes. By way of example, each of a 300 mm and a 200 mm semiconductorwafer, or any other desired size semiconductor wafer, can be processedby the same configuration of brush drives 150 a and 150 b. In anotherembodiment, brush drives 150 a and 150 b are configurable for a specificsubstrate size. By way of example, one size of brushes and brush cores118 implemented on brush drives 150 a and 150 b are designed andconfigured for a 200 mm semiconductor wafer, and a different set ofbrushes and brush cores 118 are implemented on brush drives 150 a and150 b that are designed and configured for a 300 mm semiconductor wafer.The modular design of brush drive assembly 120 enables substrateprocessing with a brush drive assembly 120 designed for processing aplurality of substrate sizes, or the brush drive assembly 120 can beremoved and replaced to customize a particular brush drive assembly 120for processing a particular substrate size.

FIGS. 7A-13C show additional views of brush drive assembly 120 withvarious features as described above identified from a plurality ofangles in accordance with an embodiment of the invention. FIG. 7A showsa view of the brush drive assembly 120 in accordance with an embodimentof the invention. Identified features include fluid delivery fittings136, mandrel support connector 151, mandrel support arm 152, brush core118, and brush drive housing 153. Also shown are brush rotating drivepulley 172, right brush rotating pulley 170 a, left brush rotatingpulley 170 b, belt 174, and motor 176, at brush drive rear mountingplate 178, and behind brush drive front mounting plate 156.

FIG. 7B shows another perspective of brush drive assembly 120 inaccordance with an embodiment of the invention. Identified features inFIG. 7B include right and left brush drives 150 a, 150 b, having fluiddelivery fittings 136, mandrel support arms 152, brush cores 118, andbrush drive housings 153. The brush drive front mounting plate 156 andthe brush drive rear mounting plate 178 are also identified. Brushrotating drive pulley 172, right brush rotating pulley 170 a, left brushrotating pulley 170 b are shown at the brush drive rear mounting plate178.

FIG. 7C shows another perspective of a brush drive assembly 120 inaccordance with an embodiment of the invention. In FIG. 7C, identifiedfeatures include a right brush drive 150 a and a left brush drive 150 bhaving brush drive housings 153, brush cores 118, and mandrel supportarms 152. Opposite the brush drive housings 153 are mandrel supportconnectors 151 having fluid delivery plugs 137. Brush drive frontmounting plate 156 separates those structures that will be insertedinto, and those structures that will remain external to the brush box100 (see FIG. 4). Additional identified features include brush anglegears 158, brush drive shafts 154, worm gear 162, motor 176, brushrotating drive pulley 172, right brush rotating pulley 170 a, left brushrotating pulley 170 b, and belt 174.

FIG. 8A shows a view of a brush drive assembly 120 in accordance with anembodiment of the present invention. Identified features in FIG. 8Ainclude brush drive rear mounting plate 178, and brush drive frontmounting plate 156. Brush drive housings 153, are shown with mandrelsupport arms 152, brush cores 118, and mandrel support connectors 151having fluid delivery fittings 136 and fluid delivery plugs 137.

FIG. 8B shows another view of a brush drive assembly 120 in accordancewith an embodiment of the invention. Features identified in FIG. 8Binclude brush drive rear mounting plate 178, and brush drive frontmounting plate 156. Brush drive housings 153, are shown with mandrelsupport arms 152, brush cores 118, and mandrel support connectors 151having fluid delivery fittings 136 and fluid delivery plugs 137.

FIG. 8C shows another view of a brush drive assembly 120 in accordancewith an embodiment of the invention. Features identified in FIG. 8Cinclude brush drive rear mounting plate 178, brush drive shafts 154, andbrush drive front mounting plate 156. Brush drive housings 153, areshown with mandrel support arms 152, brush cores 118, and mandrelsupport connectors 151 having fluid delivery fittings 136 and fluiddelivery plugs 137.

FIG. 8D shows another view of a brush drive assembly 120 in accordancewith an embodiment of the invention. In FIG. 8D, identified featuresinclude brush drive rear mounting plate 178, motor 176, brush rotatingdrive pulley 172, right brush rotating pulley 170 a, left brush rotatingpulley 170 b, and belt 174. Also identified are brush drive frontmounting plate 156, brush drive housings 153 with mandrel support arms152, mandrel support connectors 151, fluid delivery fittings 136 andfluid delivery plugs 137.

FIG. 9A is an exploded view of a brush drive assembly 120 in accordancewith another embodiment of the present invention. Features identified inFIG. 9A include motor 176 attached to brush drive rear mounting plate178. Right brush rotating pulley 170 a, left brush rotating pulley 170b, and brush rotating drive pulley 172 are interconnected with belt 174.Worm gear 162, worm shaft 164, worm drive 166, and brush drive shafts154 are shown aft of brush front mounting plate 156. Right and leftbrush drives 150 a, 150 b include brush drive housings 153 with mandrelsupport arms 152, brush cores 118, mandrel support connectors 151, fluiddelivery fittings 136 and fluid delivery plugs 137.

FIG. 9B is another exploded view of a brush drive assembly 120 inaccordance with an embodiment of the invention. Features identified inFIG. 9B include brush drive rear mounting plate 178 and brush frontmounting plate 156. Right and left brush drives 150 a, 150 b includebrush drive housings 153 with mandrel support arms 152, brush cores 118,mandrel support connectors 151, fluid delivery fittings 136 and fluiddelivery plugs 137. Brush drive shafts 154 translate the rotary driveforce generated by motor 176 (see FIG. 9A) to counter-rotate mandrelsand brushes on brush cores 118 through, in one embodiment,interconnecting gears within brush drive housings 153.

In one embodiment, right and left brush drives 150 a, 150 b are withinan interior region of brush box 100 (see FIG. 1), and associated drivecomponents as described herein and located on an opposite side of brushfront mounting plate 156 are outside of or exterior to the processingarea of brush box 100. Chemistries and other processing fluids used toprocess substrates within brush box 100 are contained within the brushbox 100 processing region by seals 156 a, and additional seals (notshown) within brush drive housings 153, which also protect brush drivecomponent parts from the corrosive effects of moisture, corrosivechemistries, and the like. Seals 156 a, however, create a component offriction in rotating components which is calibrated, compensated, orotherwise compensated in force measurement calculations, and the like.In another embodiment, a labyrinth configuration is used in place ofseals 156 a.

FIG. 10A is a side plan view of a brush drive assembly 120 in accordancewith an embodiment of the present invention. Illustrated featuresinclude belt 174, and brush front mounting plate 156. Brush drivehousing 153 is also identified having a mandrel support arm 152, brushcore 118, mandrel support connector 151, and fluid delivery fitting 136.

FIG. 10B is a bottom plan view of a brush drive assembly 120 inaccordance with an embodiment of the invention. In FIG. 10B, illustratedfeatures include right brush rotating pulley 170 a, left brush rotatingpulley 170 b, motor 176, and brush rotating drive pulley 172. Brushdrive shafts 154, connected to right brush rotating pulley 170 a andleft brush rotating pulley 170 b travel through brush front mountingplate 156 into brush drive housings 153. From each brush drive housing153, mandrel support arms 152, and brush cores 118 are shown. Eachmandrel support arm 152 is connected to a respective brush core. 118with a mandrel support connector 151, having a fluid delivery plug 137.

FIG. 11A shows an exploded view of a single brush drive 150 a, 150 b, inaccordance with an embodiment of the invention. Illustrated featuresinclude brush drive shaft 154, and brush drive housing 153. Also shownare mandrel support arm 152, brush core 118, mandrel support connector151, and fluid delivery fitting 136.

FIG. 11B shows another perspective of exploded brush drive 150 a, 150 b,in accordance with one embodiment of the present invention. Illustratedfeatures in FIG. 11B include brush drive shaft 154, brush drive housing153, brush core 118, mandrel support arm 152, mandrel support connector151, fluid delivery fitting 136 and fluid delivery plug 137. FIG. 11Cshows a detail view of the brush drive housing 153 shown in FIG. 11B.

FIG. 12A is a cross-section view of a brush drive 150 a, 150 b, inaccordance with an embodiment of the invention. FIG. 12A shows mandrel190 within brush drive 150 a, 150 b. In one embodiment, mandrel 190 isgenerally a hollow cylinder having a plurality of perforations therein,and a fitting 191 configured to receive fluid plumbing connections.Chemistries, rinses, or any other desired fluids used in substrateprocessing are dispensed through fitting 191, through the hollow mandrel190, out of the perforations, and through the brushes on brush cores 118on to the surfaces of a substrate. Also shown in FIG. 12A are mandrelsupport arm 152, between mandrel support connector 151 and brush drivehousing 153. A brush core 118 is fitted over mandrel 190.

FIG. 12B shows a detail view of the mandrel support connector 151 shownin FIG. 12A. Mandrel support arm 152 connects to mandrel supportconnector 151 on one side of mandrel support connector 151, and themandrel 190, having a brush core attached thereto, connects to themandrel support connector 151 adjacent to the mandrel support arm 152.Fitting 191 is within the mandrel support connector 151, configured toconnect to fluid delivery fitting 136 (not shown).

FIG. 12C shows a detail view of the brush drive housing 153 shown inFIG. 12A. Mandrel support arm 152 connects to brush drive housing 153 onone side of brush drive housing 153, and the mandrel 190, having a brushcore attached thereto, connects to the brush drive housing 153 adjacentto the mandrel support arm 152. Bearings, seals, and the like are notspecifically identified in FIG. 12C, but visible to illustrate anexemplary configuration.

FIG. 13A shows another side plan view of a brush drive assembly 120 inaccordance with an embodiment of the present invention. Illustratedfeatures include belt 174, brush drive rear mounting plate 178, andbrush front mounting plate 156. Brush drive housing 153 is alsoidentified having a mandrel support arm 152, brush core 118, mandrelsupport connector 151, and fluid delivery fitting 136.

FIG. 13B is another bottom plan view of a brush drive assembly 120 inaccordance with an embodiment of the invention. In FIG. 13B, illustratedfeatures include brush drive housings 153, mandrel support arms 152, andbrush cores 118. Each mandrel support arm 152 is connected to arespective brush core 118 with a mandrel support connector 151, having afluid delivery plug 137.

FIG. 13C shows a detail view of the brush drive components from FIG. 13Bthat are exterior to the brush box 100 (see FIG. 4). Illustratedfeatures include right brush rotating pulley 170 a, left brush rotatingpulley 170 b, motor 176, and brush rotating drive pulley 172. Brushdrive shafts 154, connected to right brush rotating pulley 170 a andleft brush rotating pulley 170 b travel through brush front mountingplate 156 into brush drive housings 153 (not identified in FIG. 13C).Worm shaft 164 and brush angle gears 158 are also identified in FIG.13C.

FIG. 14A shows a detailed view of modular edge wheel assembly 114 inaccordance with an embodiment of the invention. The illustrated edgewheel assembly 114 includes an edge wheel assembly block 200 configuredto support and contain the primary features of the edge wheel assembly114. In one embodiment, the edge wheel assembly block 200 is a solidstructure constructed of a corrosive-resistant material such as PEIT, orother light weight, durable, and easily fabricated material, and ismanufactured as a single component part for a plurality ofimplementations as is discussed below.

Edge wheels 116 a and 116 b are attached to edge wheel shafts 204 whichare configured through edge wheel assembly block 200 in shaft bores 230or 232 (see FIGS. 14D, 14E, 14F). In one embodiment, two pairs of shaftbores 230 and 232 are configured into edge wheel assembly block 200 toenable configuration of edge wheel assembly insert 114 for a pluralityof substrate sizes. By way of example, edge wheel shafts 204 mountedthrough shaft bores 230 might position a 200 mm substrate on edge wheels116 a and 116 b for optimal processing, and edge wheel shafts 204mounted through shaft bores 232 might position a 300 mm substrate onedge wheels 116 a and 116 b for optimal processing. Shaft bores 230 or232 not used in a desired implementation are plugged with bore plugs 234(see FIGS. 14B, 14E). As will be described in greater detail, shaftbores 230 and 232 are configured with passages in the interior of edgewheel assembly block 200, and bore plugs 234 seal the passages andbores. In one embodiment of the invention, shaft bores 230 and 232provide for the easy configuration of the modular edge wheel assembly114 for optimal processing of both 200 mm substrates and 300 mmsubstrates. In one embodiment, edge wheels 116 a, 116 b, are provided ofa particular size to be used with a specific size of substrate.

Edge wheels 116 a and 116 b are rotated by edge wheel shafts 204. Edgewheel shafts 204 are rotated by driven pulleys 212 connected to an edgewheel motor 202. Edge wheel motor 202 is attached to edge wheel motorplate 208 and drives drive pulley 210. Drive pulley 210 is connected todriven pulleys 212 by belt 216 in order to rotate driven pulleys 212connected to drive shafts 204, thereby rotating edge wheels 116 a and116 b. Belt 216 is configured to rotate driven pulleys 212 in the samedirection so that edge wheels 116 a and 116 b rotate a substrate (notshown) positioned thereon. Belt tensioner 214 is provided to maintainconstant and appropriate contact between belt 216, drive pulley 210, anddriven pulleys 212. In one embodiment, configuration of drive shafts 204in shaft bores 230 utilizes a larger belt 216 than configuration of edgewheel shafts 204 configured in shaft bores 232. In another embodiment,the process of rotating edge wheel shafts 204 is accomplished by gears.

Edge wheel motor plate 208 is configured to attach edge wheel drivemotor 202 to edge wheel assembly block 200. In one embodiment, edgewheel motor plate 208 is reversible, and thereby configurable to attachedge wheel drive motor 202 to edge wheel assembly block 200 in aplurality of implementations of the edge wheel assembly 114. By way ofexample, edge wheel assembly insert 114 is configurable forimplementation in either a right or left panel of brush box 100 (seeFIG. 1), and the same edge wheel motor plate 208 is configured to attachedge wheel drive motor 202 to edge wheel assembly block 200 in bothconfigurations.

In one embodiment of the invention, edge wheel assembly block 200includes a plurality of passages through the interior of the edge wheelassembly block 200 for fluid delivery to a plurality of locations in andon or around edge wheel assembly 114. Edge wheel assembly block fitting206 is provided to connect fluid supply to the edge wheel assembly 114.In one embodiment, supplied fluid includes DI water, and is provided forrinsing, lubrication, cooling, and the like of the edge of a substratepositioned on edge wheels 116 a and 116 b. In addition, edge wheels 116a and 116 b are rinsed, cooled, lubricated, and the like, as well asedge wheel shafts 204, shaft bores 230 and 232, and interior seals,fittings, bushings, and the like of edge wheel assembly block 200.Sprayers 220 are provided on the edge wheel assembly block 200 in aplurality of locations for desired dispensing of fluids on a substrateedge, edge wheels 116 a and 116 b, and edge wheel shafts 204. In oneembodiment, edge wheel assembly block 200 is configured to acceptsprayers 220 in a plurality of locations adjacent to both shaft bores230 and 232 for sprayer 220 implementation in a plurality of substratesize configurations of edge wheel assembly 114.

In one embodiment, shaft bore sprayer 236 (see FIG. 14E) is provided todispense fluid to the interior of shaft bores 230 and 232 for coolingand lubrication. Shaft bore sprayers 236 are connected to the interiorfluid passages within edge wheel assembly block 200 such that when fluidis supplied to the edge wheel assembly 114, edge wheel shafts 204 arecooled and lubricated with the same fluid used for rinsing, cooling,lubricating, and the like of edge wheels 116 a and 116 b, and thesubstrate edge. Shaft bore 230 or 232 that does not have a edge wheelshaft 204 configured in a desired configuration is sealed with bore plugfittings 234 (see FIGS. 14B, 14E).

Interior fluid passages within edge wheel assembly block 200 areconfigured for a plurality of applications of the edge wheel assembly114. The interior fluid passages provide for the configuration ofsprayers 220 in desired locations, and for the implementation of bothshaft bores 230 and 232 to contain shaft bore sprayers 236. In oneembodiment, edge wheel assembly block 200 is thereby fabricated as asingle component piece to be implemented in a plurality ofconfigurations of edge wheel assembly 114. In one embodiment, edge wheelassembly block 200 is fabricated as a symmetrical component about amid-point vertical axis. The same assembly block 200 is thereforecapable of attaching to a brush box 100 (see FIG. 1) on either a rightor left side of brush box 100, and the configured sprayers, fittings,and the like can be configured for either orientation to performrequired functions as necessary. The interior fluid passages areconfigured to provide the desired fluid supply in the plurality ofdesired applications without requiring specifically and speciallymanufactured piece parts. In one embodiment, openings 224 in edge wheelassembly block 200 are created during the manufacture of edge wheelassembly block 200, and are fitted with plugs 224 a to seal the interiorfluid passages.

FIG. 14B shows another view of edge wheel assembly 114 in accordancewith an embodiment of the invention. Illustrated features in FIG. 14Binclude edge wheel assembly block 200 with openings 224 in edge wheelassembly block 200 created during manufacture which can be fitted withplugs 224 a. Edge wheel assembly block fitting 206 is provided toconnect fluid supply to the edge wheel assembly 114, and sprayers 220are shown adjacent to edge wheels 116 a, 116 b. An unused bore is shownsealed by bore plug 234. Edge wheel motor plate 208 is configured toattach edge wheel drive motor 202 to edge wheel assembly block 200. Inone embodiment, edge wheel motor plate 208 is reversible, and therebyconfigurable to attach edge wheel drive motor 202 to edge wheel assemblyblock.200 in a plurality of implementations of the edge wheel assembly114.

FIG. 14C shows another view of edge wheel assembly 114 in accordancewith an embodiment of the invention. Identified features in FIG. 14Cinclude edge wheel assembly block 200, sprayer 220, and edge wheels 116a, 116 b. Edge wheel motor plate 208 is shown attaching edge wheel drivemotor 202 to edge wheel assembly block 200.

FIG. 14D shows a cross-sectional view of edge wheel assembly 114 inaccordance with an embodiment of the invention. Features identified inFIG. 14D include edge wheels 116 a, 116 b, sprayer 220, and edge wheelassembly block fitting 206. Shaft bores 230 and 232 are identified, anddescribed in greater detail below.

FIG. 14E shows a detail cross-sectional view of shaft bores 230, 232from FIG. 14D. In FIG. 14E, side-by-side shaft bores 230 and 232 areshown with an edge wheel shaft 204 and edge wheel 116 configured inshaft bore 230, and a bore plug 234 configured in unused shaft bore 232.Shaft bore sprayer 236 is shown adjacent to edge wheel shaft 204 inshaft bore 230. In one embodiment, shaft bore sprayer 236 providescooling, lubrication, and the like to edge wheel shaft 204 and shaftbore 230, and additionally keeps shaft seals, bearings, bushings, (notidentified in FIG. 14E, but visible) and the like lubricated, pliable,and properly functioning.

FIG. 14F is a side plan view of edge wheel assembly 114 in accordancewith an embodiment of the present invention. Identified features in FIG.14F include edge wheel assembly block 200 having shaft bores 230 and232. Driven pulleys 212, and drive pulley 210 are interconnected by belt216, with belt tensioner 214 provided to maintain constant andappropriate contact between belt 216, drive pulley 210, and drivenpulleys 212. In an embodiment with drive shafts 204 (not shown) in shaftbores 232, a different size of belt 216 may be provided than that in theillustrated embodiment. Edge wheel motor plate 208 is configured toattach edge wheel drive motor 202 (not visible in FIG. 14F) to edgewheel assembly block 200.

FIG. 15A shows another perspective view of edge wheel assembly 114 inaccordance with an embodiment of the invention. In FIG. 15A, identifiedfeatures include edge wheel assembly block 200 with openings 224 andplugs 224 a, and sprayers 220. Edge wheels 116 a, 116 b are configuredin one set of shaft bores, and unused shaft bores 232 are visible. Edgewheel drive motor 202 is attached to edge wheel assembly block 200 withedge wheel motor plate 208. Fluids, chemistries, and the like areprovided to edge wheel assembly block 200 through edge wheel assemblyblock fitting 206.

FIG. 15B shows another perspective view of edge wheel assembly 114 inaccordance with another embodiment of the present invention. Identifiedfeatures in FIG. 15B include edge wheel assembly block 200 with openings224 and plugs 224 a, and sprayers 220. Edge wheels 116 a, 116 b areconfigured in shaft bores 230, and unused shaft bores 232 are visible.Edge wheel drive motor 202 is attached to edge wheel assembly block 200with edge wheel motor plate 208.

FIG. 15C shows another perspective view of edge wheel assembly 114 inaccordance with another embodiment of the invention. Identified featuresin FIG. 15C driven pulleys 212, and drive pulley 210 interconnected bybelt 216, with belt tensioner 214 provided to maintain constant andappropriate contact between belt 216, drive pulley 210, and drivenpulleys 212. Edge wheels 116 a, 116 b are configured in shaft bores 230(not identified in FIG. 15C), and unused shaft bores 232 are visible.Edge wheel drive motor 202 is attached to edge wheel assembly block 200with edge wheel motor plate 208. Fluids, chemistries, and the like areprovided to edge wheel assembly block 200 through edge wheel assemblyblock fitting 206.

In one embodiment of the present invention, substantially all pieces,components, and assembly parts of the brush box 100 that may be exposedto processing fluids are constructed of durable, light weight, andeasily manufactured, molded, and configured material that is resistantto corrosion or other deterioration that might result from exposure to aplurality of processing fluids. Materials for such wet exposure includeplastic, PET, or other similar materials. Supporting, structural, andother such component parts of the brush box 100 that are generally notexposed to processing fluids are manufactured of strong, light weight,and low particle generating materials such as hastelloy and stainlesssteel.

As described, one embodiment of the brush box 100 is easily configurablefor a plurality of applications. Primary components are generallymodular and symmetrical to provide for more efficient manufacture ofcomponents that are implemented in a plurality of configurations. In atypical implementation, brush box 100 is implemented as a pair ofside-by-side brush boxes 100, with a left and right brush box 100. Leftand right brush boxes 100 are typically of a symmetrical configurationwith maximum access for use and serviceability. In one embodiment, sucha configuration includes the edge wheel insert assemblies 114 configuredto the exterior panels of brush box 100, and doors 110 hinged to opentowards the center of the configuration. The present invention providesfor the configuration of a plurality of desired implementations withoutrequiring specialized or specific manufacture of the various componentparts. In this manner, cost of manufacture is significantly reduced, andserviceability is significantly increased.

FIGS. 16A and 16B show an integrated processing tool incorporating apair of brush boxes 100 in accordance with an embodiment of theinvention. In FIG. 16A, a pair of brush boxes 100 is configuredside-by-side, and a pair of drying tools is configured above the brushboxes 100. Implementing a pair of brush boxes 100 with a pair of dryingtools provides an efficient and economical method of substrateprocessing at a plurality of substrate process steps. By way of example,batches of semiconductor wafers can be processed through a post-CMP wetclean with minimal transfer and handling of the wafers when theintegrated processing tool is positioned proximate to the CMP tool.

FIG. 16B shows the same integrated processing tool as in FIG. 16A from adifferent angle. As can be seen, one embodiment of the inventionimplementing a side-by-side configuration maximizes serviceability andspace efficiency. Brush boxes 100 are configured with such assemblies asthe wafer sensing apparatus, the substrate stabilizer assembly, and theedge wheel assembly on the exterior or outboard panel 300 of each brushbox 100. Doors 110 are configured to open toward the interior or inboardregion of the tool with securing screws 130 shown on the exterior oroutboard edge of doors 110. A system controller is shown and is used tointegrate the plurality of functions of the present invention, as wellas the present invention with the additional processing tools.

Although the foregoing invention has been described in some detail forpurposes of clarity of understanding, it will be apparent that certainchanges and modifications may be practiced within the scope of theappended claims. Accordingly, the present embodiments are to beconsidered as illustrative and not restrictive, and the invention is notto be limited to the details given herein, but may be modified withinthe scope and equivalents of the appended claims.

1. In a brush box for processing a substrate, a modular edge wheelassembly, comprising: an edge wheel assembly blocks, the edge wheelassembly block including passages through which fluids can flow forcooling and lubrication of the substrate and the modular edge wheelassembly; a pair of edge wheels, each edge wheel being connected to anedge wheel shaft at a processing end, each edge wheel shaft projectingthrough the edge wheel assembly block through an edge wheel shaft bore;and an edge wheel drive motor configured to drive edge wheel drivepulleys connected to a drive end of each edge wheel shaft, wherein themodular edge wheel assembly is configurable to be interchangeablyattached as a unit to one of a right side and a left side of the brushbox.
 2. The modular edge wheel assembly of claim 1, wherein the pair ofedge wheels are configured to receive and support a substrate to beprocessed in the brush box, the substrate being positioned in a verticalorientation within the brush box.
 3. The modular edge wheel assembly ofclaim 2, wherein when the edge wheel drive motor drives the edge wheeldrive pulleys, the edge wheels are caused to rotate, and the substratesupported on the edge wheels is thereby caused to rotate.
 4. The modularedge wheel assembly of claim 1, further comprising an edge wheel motorplate configured to couple the edge wheel drive motor to the edge wheelassembly block.
 5. The modular edge wheel assembly of claim 4, whereinthe edge wheel motor plate is capable of being coupled to the edge wheelassembly block in one of two locations, one location for when themodular edge wheel assembly is attached to the right side of the brushbox and one location for when the modular edge wheel assembly isattached to the left side of the brush box.
 6. The modular edge wheelassembly of claim 1, further comprising sprayers attached to the edgewheel assembly block and configured to spray fluid on each of the pairof edge wheels.
 7. The modular edge wheel assembly of claim 1, whereinthe modular edge wheel assembly is configurable for processing aplurality of substrate sizes.
 8. An edge wheel assembly for supporting avertically oriented substrate, the edge wheel assembly designed to beinserted into side walls of a brush box, the edge wheel assemblycomprising: an edge wheel assembly block, the edge wheel assembly blockbeing capable of interchangeably mounting to either of two side walls ofthe brush box; a plurality of passages through the edge wheel assemblyblock, the plurality of passages configured to provide fluid flowthrough the edge wheel assembly block; a first edge wheel and a secondedge wheel being mounted to the edge wheel assembly block, each of thefirst and second edge wheels having a groove that is capable ofsupporting the substrate, the first and second edge wheels further beingaligned with one another to enable rotation of the supported substrate;and a drive motor being coupled to a plate, the plate being designed tocouple to the edge wheel assembly block, the plate being coupled toeither one of a first side and a second side of the edge wheel assemblyblock, the first side and the second side being external to the brushbox.
 9. The edge wheel assembly of claim 8, wherein the edge wheelassembly block includes at least two pairs of shaft bores.
 10. The edgewheel assembly of claim 9, wherein each of the at least two pairs ofshaft bores is defined for the substrate having a particular diameter.11. The edge wheel assembly of claim 8, wherein the fluid flow isconfigured to lubricate and to cool each of the at least two pairs ofshaft bores.
 12. The edge wheel assembly of claim 8, wherein the fluidflow is configured to lubricate and to cool an edge of the substrate.13. The edge wheel assembly of claim 8, wherein the drive motor causesrotation of the first edge wheel and the second edge wheel with a drivebelt assembly.
 14. The edge wheel assembly of claim 8, wherein the drivemotor caused rotation of the first edge wheel and the second edge wheelwith a gear assembly.
 15. An edge wheel assembly in a semiconductorwafer fabrication brush box, the edge wheel assembly configured tosupport and to rotate a semiconductor wafer in a vertical orientationwithin the brush box, the edge wheel assembly comprising: an edge wheelassembly block having at least two pairs of edge wheel shaft boresthrough the edge wheel assembly block; a first edge wheel attached to aprocessing end of a first edge wheel shaft and a second edge wheelattached to a processing end of a second edge wheel shaft, the firstedge wheel shaft and the second edge wheel shaft extending through theedge wheel assembly block in one of the at least two pairs of edge wheelshaft bores; and a drive motor being coupled to the edge wheel assemblyblock with a plate, the plate being designed to couple drive motor toeither one of a first position and a second position on the edge wheelassembly block, the first position and the second position beingexternal to the brush box and enabling insertion of the edge wheelassembly into either one of a first side and a second side of the brushbox, wherein the edge wheel assembly block is formed with a plurality ofpassages through the edge wheel assembly block, the plurality ofpassages being symmetrical about a horizontal and a vertical center lineof the edge wheel assembly block and configured to enable fluid flowthrough the edge wheel assembly block.
 16. The edge wheel assembly ofclaim 15, further comprising: a first drive pulley connected to a driveend of the first edge wheel shaft; a second drive pulley connected to adrive end of the second edge wheel shaft; and a drive belt configured tointerconnect the drive motor to the first and second drive pulleys,wherein the drive motor rotates the first and the second drive pulleyscausing rotation of the first and second edge wheels.
 17. The edge wheelassembly of claim 15, wherein the semiconductor wafer is one of a 200 mmwafer and a 300 mm wafer.